期刊
JOURNAL OF NON-CRYSTALLINE SOLIDS
卷 354, 期 12-13, 页码 1407-1410出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.jnoncrysol.2007.02.093
关键词
glass-ceramics; conductivity; microstructure; microcrystallinity; thermal properties
In this study, one kind of lithium aluminosilicate-beta-quartz glass-ceramic containing Na2O has been chosen, which can be used for low-temperature bonding with a higher bonding rate for the manufacture of microelectronic mechanical systems. The microstructure of the glass-ceramic is analyzed by transmission electron microscopy, high resolution transmission electron microscopy, selected-area diffraction, energy dispersive spectrometry and X-ray diffraction. The influence of the heat treatment process of the glass on the properties and the microstructure of the glass-ceramics is discussed. The microstructure of the glass-ceramic has the continuous glassy region with higher alkali metal ion content, which benefits the low-temperature anodic bonding. (c) 2007 Elsevier B.V. All rights reserved.
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