Fluorination of Edges and Central Areas of Monolayer Graphene by SF6 and CHF3 Plasma Treatments

Title
Fluorination of Edges and Central Areas of Monolayer Graphene by SF6 and CHF3 Plasma Treatments
Authors
Keywords
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Journal
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 13, Issue 2, Pages 1331-1334
Publisher
American Scientific Publishers
Online
2013-02-23
DOI
10.1166/jnn.2013.5996

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