Fluorination of Edges and Central Areas of Monolayer Graphene by SF6 and CHF3 Plasma Treatments

标题
Fluorination of Edges and Central Areas of Monolayer Graphene by SF6 and CHF3 Plasma Treatments
作者
关键词
-
出版物
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 13, Issue 2, Pages 1331-1334
出版商
American Scientific Publishers
发表日期
2013-02-23
DOI
10.1166/jnn.2013.5996

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