Mechanism of the Enhancement of Electrical Conductivity of Nanocrystalline Silicon Due to Hydrogen Plasma Treatment

Title
Mechanism of the Enhancement of Electrical Conductivity of Nanocrystalline Silicon Due to Hydrogen Plasma Treatment
Authors
Keywords
-
Journal
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 13, Issue 10, Pages 6711-6720
Publisher
American Scientific Publishers
Online
2013-08-07
DOI
10.1166/jnn.2013.7783

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