Mechanism of the Enhancement of Electrical Conductivity of Nanocrystalline Silicon Due to Hydrogen Plasma Treatment

标题
Mechanism of the Enhancement of Electrical Conductivity of Nanocrystalline Silicon Due to Hydrogen Plasma Treatment
作者
关键词
-
出版物
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 13, Issue 10, Pages 6711-6720
出版商
American Scientific Publishers
发表日期
2013-08-07
DOI
10.1166/jnn.2013.7783

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