Effects of Deposition Power and Oxygen Partial Pressure on Low-Temperature-Processed In-Ga-Zn-O Thin-Film Transistors

Title
Effects of Deposition Power and Oxygen Partial Pressure on Low-Temperature-Processed In-Ga-Zn-O Thin-Film Transistors
Authors
Keywords
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Journal
Journal of Nanoelectronics and Optoelectronics
Volume 6, Issue 3, Pages 283-287
Publisher
American Scientific Publishers
Online
2011-09-20
DOI
10.1166/jno.2011.1169

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