Stress investigation of the AlGaN/GaN micromachined circular diaphragms of a pressure sensor

Dislocation bending and tensile stress generation in GaN and AlGaN films

(2012) Srinivasan Raghavan et al.   JOURNAL OF CRYSTAL GROWTH

Residual stress distribution and deflection analysis of very thin GaN membrane supported devices

(2012) A Cismaru et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Micromachined membrane structures for pressure sensors based on AlGaN/GaN circular HEMT sensing device

(2012) T. Lalinský et al.   MICROELECTRONIC ENGINEERING

Comparison of two experimental methods for the mechanical characterization of thin or thick films from the study of micromachined circular diaphragms

(2012) C. Malhaire   REVIEW OF SCIENTIFIC INSTRUMENTS

Computer aided modelling and diaphragm design approach for high sensitivity silicon-on-insulator pressure sensors

(2011) M. Narayanaswamy et al.   MEASUREMENT

AlGaN/GaN C-HEMT structures for dynamic stress detection

(2011) Gabriel Vanko et al.   SENSORS AND ACTUATORS A-PHYSICAL

Piezoelectric response of AlGaN/GaN-based circular-HEMT structures

(2010) T. Lalinský et al.   MICROELECTRONIC ENGINEERING

Piezoelectric MEMS sensors: state-of-the-art and perspectives

(2009) S Tadigadapa et al.   MEASUREMENT SCIENCE and TECHNOLOGY