Stretchable copper interconnects with three-dimensional coiled structures

Title
Stretchable copper interconnects with three-dimensional coiled structures
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 12, Pages 127002
Publisher
IOP Publishing
Online
2013-11-15
DOI
10.1088/0960-1317/23/12/127002

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