Stretchable copper interconnects with three-dimensional coiled structures

标题
Stretchable copper interconnects with three-dimensional coiled structures
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 12, Pages 127002
出版商
IOP Publishing
发表日期
2013-11-15
DOI
10.1088/0960-1317/23/12/127002

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