Design, fabrication and application of an SOI-based resonant electric field microsensor with coplanar comb-shaped electrodes

Published 2013 View Full Article

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Title
Design, fabrication and application of an SOI-based resonant electric field microsensor with coplanar comb-shaped electrodes
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 5, Pages 055002
Publisher
IOP Publishing
Online
2013-03-21
DOI
10.1088/0960-1317/23/5/055002

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