Design, fabrication and application of an SOI-based resonant electric field microsensor with coplanar comb-shaped electrodes

出版年份 2013 全文链接

标题

Design, fabrication and application of an SOI-based resonant electric field microsensor with coplanar comb-shaped electrodes

作者

关键词

-

出版物

JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Volume 23, Issue 5, Pages 055002

出版商

IOP Publishing

发表日期

2013-03-21

DOI

10.1088/0960-1317/23/5/055002

向作者/读者发起求助以获取更多资源

Protocol

Reagent

Reprint

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Find the ideal target journal for your manuscript

Explore over 38,000 international journals covering a vast array of academic fields.

Search

© Peeref 2019-2024. All rights reserved.