One-step sculpting of silicon microstructures from pillars to needles for water and oil repelling surfaces

Title
One-step sculpting of silicon microstructures from pillars to needles for water and oil repelling surfaces
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 2, Pages 025004
Publisher
IOP Publishing
Online
2012-12-21
DOI
10.1088/0960-1317/23/2/025004

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