One-step sculpting of silicon microstructures from pillars to needles for water and oil repelling surfaces

标题
One-step sculpting of silicon microstructures from pillars to needles for water and oil repelling surfaces
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 2, Pages 025004
出版商
IOP Publishing
发表日期
2012-12-21
DOI
10.1088/0960-1317/23/2/025004

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