Patterning of platinum (Pt) thin films by chemical wet etching in Aqua Regia

Title
Patterning of platinum (Pt) thin films by chemical wet etching in Aqua Regia
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 22, Issue 6, Pages 067001
Publisher
IOP Publishing
Online
2012-05-29
DOI
10.1088/0960-1317/22/6/067001

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