Patterning of platinum (Pt) thin films by chemical wet etching in Aqua Regia

标题
Patterning of platinum (Pt) thin films by chemical wet etching in Aqua Regia
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 22, Issue 6, Pages 067001
出版商
IOP Publishing
发表日期
2012-05-29
DOI
10.1088/0960-1317/22/6/067001

向作者/读者发起求助以获取更多资源

Add your recorded webinar

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started