Piezoelectric polydimethylsiloxane films for MEMS transducers

Title
Piezoelectric polydimethylsiloxane films for MEMS transducers
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 22, Issue 1, Pages 015013
Publisher
IOP Publishing
Online
2011-12-23
DOI
10.1088/0960-1317/22/1/015013

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