Piezoelectric polydimethylsiloxane films for MEMS transducers

标题
Piezoelectric polydimethylsiloxane films for MEMS transducers
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 22, Issue 1, Pages 015013
出版商
IOP Publishing
发表日期
2011-12-23
DOI
10.1088/0960-1317/22/1/015013

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