Inclined nanoimprinting lithography-based 3D nanofabrication

Title
Inclined nanoimprinting lithography-based 3D nanofabrication
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 21, Issue 6, Pages 065036
Publisher
IOP Publishing
Online
2011-05-19
DOI
10.1088/0960-1317/21/6/065036

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