High-resolution permanent photoresist laminate TMMF for sealed microfluidic structures in biological applications

Title
High-resolution permanent photoresist laminate TMMF for sealed microfluidic structures in biological applications
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 21, Issue 9, Pages 095009
Publisher
IOP Publishing
Online
2011-08-05
DOI
10.1088/0960-1317/21/9/095009

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