SOI/elastomer process for energy storage and rapid release

Title
SOI/elastomer process for energy storage and rapid release
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 10, Pages 104011
Publisher
IOP Publishing
Online
2010-09-15
DOI
10.1088/0960-1317/20/10/104011

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