Energetic Nanoporous Silicon Devices

Published 2009 View Full Article

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Title
Energetic Nanoporous Silicon Devices
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 18, Issue 4, Pages 799-807
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2009-07-01
DOI
10.1109/jmems.2009.2023883
References
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