Fabrication of Au micropatterns on vertical Si sidewalls using flexible PDMS shadow masks

Published 2010 View Full Article

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Title
Fabrication of Au micropatterns on vertical Si sidewalls using flexible PDMS shadow masks
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 12, Pages 127001
Publisher
IOP Publishing
Online
2010-11-17
DOI
10.1088/0960-1317/20/12/127001
References
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