Optical interferometric displacement calibration and thermomechanical noise detection in bulk focused ion beam-fabricated nanoelectromechanical systems

Title
Optical interferometric displacement calibration and thermomechanical noise detection in bulk focused ion beam-fabricated nanoelectromechanical systems
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 11, Pages 115038
Publisher
IOP Publishing
Online
2010-10-30
DOI
10.1088/0960-1317/20/11/115038

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