Fabrication of microfilters using excimer laser micromachining and testing of pressure drop

Published 2009 View Full Article

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Title
Fabrication of microfilters using excimer laser micromachining and testing of pressure drop
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 2, Pages 025025
Publisher
IOP Publishing
Online
2009-01-28
DOI
10.1088/0960-1317/19/2/025025
References
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