Fabrication of microfilters using excimer laser micromachining and testing of pressure drop

标题
Fabrication of microfilters using excimer laser micromachining and testing of pressure drop
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 2, Pages 025025
出版商
IOP Publishing
发表日期
2009-01-28
DOI
10.1088/0960-1317/19/2/025025

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