Piezoelectric ultrasonic resonant motor with stator diameter less than 250 µm: theProteusmotor

Title
Piezoelectric ultrasonic resonant motor with stator diameter less than 250 µm: theProteusmotor
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 2, Pages 022001
Publisher
IOP Publishing
Online
2009-01-21
DOI
10.1088/0960-1317/19/2/022001

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