Piezoelectric ultrasonic resonant motor with stator diameter less than 250 µm: theProteusmotor

标题
Piezoelectric ultrasonic resonant motor with stator diameter less than 250 µm: theProteusmotor
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 2, Pages 022001
出版商
IOP Publishing
发表日期
2009-01-21
DOI
10.1088/0960-1317/19/2/022001

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