A fatigue test method for Pb(Zr,Ti)O3thin films by using MEMS-based self-sensitive piezoelectric microcantilevers

标题
A fatigue test method for Pb(Zr,Ti)O3thin films by using MEMS-based self-sensitive piezoelectric microcantilevers
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 11, Pages 115007
出版商
IOP Publishing
发表日期
2008-09-25
DOI
10.1088/0960-1317/18/11/115007

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