Characterization and modeling of 2D-glass micro-machining by spark-assisted chemical engraving (SACE) with constant velocity

Published 2008 View Full Article

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Title
Characterization and modeling of 2D-glass micro-machining by spark-assisted chemical engraving (SACE) with constant velocity
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 6, Pages 065016
Publisher
IOP Publishing
Online
2008-05-10
DOI
10.1088/0960-1317/18/6/065016

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