Characterization and modeling of 2D-glass micro-machining by spark-assisted chemical engraving (SACE) with constant velocity

标题
Characterization and modeling of 2D-glass micro-machining by spark-assisted chemical engraving (SACE) with constant velocity
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 6, Pages 065016
出版商
IOP Publishing
发表日期
2008-05-10
DOI
10.1088/0960-1317/18/6/065016

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