Electrothermal Atomic-Force Microscope Cantilever With Integrated Heater and n-p-n Back-to-Back Diodes

Authors

Keywords

Journal

Volume 20, Issue 3, Pages 644-653

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Online

2011-04-16

DOI

10.1109/jmems.2011.2127455

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