Electrothermal Atomic-Force Microscope Cantilever With Integrated Heater and n-p-n Back-to-Back Diodes

标题
Electrothermal Atomic-Force Microscope Cantilever With Integrated Heater and n-p-n Back-to-Back Diodes
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 20, Issue 3, Pages 644-653
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2011-04-16
DOI
10.1109/jmems.2011.2127455

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