A Latchable Phase-Change Microvalve With Integrated Heaters

Published 2009 View Full Article

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Title
A Latchable Phase-Change Microvalve With Integrated Heaters
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 18, Issue 4, Pages 860-867
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2009-07-16
DOI
10.1109/jmems.2009.2024806

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