A Latchable Phase-Change Microvalve With Integrated Heaters

标题
A Latchable Phase-Change Microvalve With Integrated Heaters
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 18, Issue 4, Pages 860-867
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2009-07-16
DOI
10.1109/jmems.2009.2024806

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