Energetic Nanoporous Silicon Devices

标题
Energetic Nanoporous Silicon Devices
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 18, Issue 4, Pages 799-807
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2009-07-01
DOI
10.1109/jmems.2009.2023883

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