Polymeric Thermal Microactuator With Embedded Silicon Skeleton: Part II—Fabrication, Characterization, and Application for 2-DOF Microgripper

Published 2008 View Full Article

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Title
Polymeric Thermal Microactuator With Embedded Silicon Skeleton: Part II—Fabrication, Characterization, and Application for 2-DOF Microgripper
Authors
Keywords
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Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 17, Issue 4, Pages 823-831
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2008-08-07
DOI
10.1109/jmems.2008.924275
References
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