Polymeric Thermal Microactuator With Embedded Silicon Skeleton: Part I—Design and Analysis

Title
Polymeric Thermal Microactuator With Embedded Silicon Skeleton: Part I—Design and Analysis
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 17, Issue 4, Pages 809-822
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2008-08-07
DOI
10.1109/jmems.2008.924842

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