Electrostatic stiffness correction for quadrature error in decoupled dual-mass MEMS gyroscope

Published 2014 View Full Article

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Title
Electrostatic stiffness correction for quadrature error in decoupled dual-mass MEMS gyroscope
Authors
Keywords
-
Journal
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 13, Issue 3, Pages 033003
Publisher
SPIE-Intl Soc Optical Eng
Online
2014-07-15
DOI
10.1117/1.jmm.13.3.033003

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