Three-dimensional x-ray metrology for block copolymer lithography line-space patterns

Published 2013 View Full Article

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Title
Three-dimensional x-ray metrology for block copolymer lithography line-space patterns
Authors
Keywords
-
Journal
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 12, Issue 3, Pages 031103
Publisher
SPIE-Intl Soc Optical Eng
Online
2013-08-14
DOI
10.1117/1.jmm.12.3.031103

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