Effect of oxygen addition to an argon plasma on etching selectivity of poly(methyl methacrylate) to polystyrene

Published 2013 View Full Article

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Title
Effect of oxygen addition to an argon plasma on etching selectivity of poly(methyl methacrylate) to polystyrene
Authors
Keywords
-
Journal
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 12, Issue 4, Pages 041309
Publisher
SPIE-Intl Soc Optical Eng
Online
2013-11-09
DOI
10.1117/1.jmm.12.4.041309

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