Micromachined optically transparent, flexible pressure sensor array exhibiting ultrahigh sensitivity

Title
Micromachined optically transparent, flexible pressure sensor array exhibiting ultrahigh sensitivity
Authors
Keywords
-
Journal
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 11, Issue 1, Pages 013005
Publisher
SPIE-Intl Soc Optical Eng
Online
2012-02-23
DOI
10.1117/1.jmm.11.1.013005

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