Fabrication of submicron metallic grids with interference and phase-mask holography

Published 2011 View Full Article

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Title
Fabrication of submicron metallic grids with interference and phase-mask holography
Authors
Keywords
-
Journal
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 10, Issue 1, Pages 013011
Publisher
SPIE-Intl Soc Optical Eng
Online
2011-01-26
DOI
10.1117/1.3541794
References
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