Mechanically Amplified 3-DoF Nonresonant Microelectromechanical Systems Gyroscope Fabricated in Low Cost MetalMUMPs Process

出版年份 2011 全文链接

标题

作者

关键词

出版物

Volume 133, Issue 11, Pages 111002

出版商

ASME International

发表日期

2011-11-12

DOI

10.1115/1.4004790

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