Aluminum-doped zinc oxide films grown by atomic layer deposition for transparent electrode applications

标题
Aluminum-doped zinc oxide films grown by atomic layer deposition for transparent electrode applications
作者
关键词
-
出版物
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
Volume 22, Issue 12, Pages 1810-1815
出版商
Springer Nature
发表日期
2011-04-18
DOI
10.1007/s10854-011-0367-0

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