Sub-50 nm patterning of functional oxides by soft lithographic edge printing

Title
Sub-50 nm patterning of functional oxides by soft lithographic edge printing
Authors
Keywords
-
Journal
JOURNAL OF MATERIALS CHEMISTRY
Volume 22, Issue 19, Pages 9501
Publisher
Royal Society of Chemistry (RSC)
Online
2012-03-31
DOI
10.1039/c2jm31121f

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