Iridium metal and iridium oxide thin films grown by atomic layer deposition at low temperatures

Title
Iridium metal and iridium oxide thin films grown by atomic layer deposition at low temperatures
Authors
Keywords
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Journal
JOURNAL OF MATERIALS CHEMISTRY
Volume 21, Issue 41, Pages 16488
Publisher
Royal Society of Chemistry (RSC)
Online
2011-09-16
DOI
10.1039/c1jm12245b

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