Iridium metal and iridium oxide thin films grown by atomic layer deposition at low temperatures

标题
Iridium metal and iridium oxide thin films grown by atomic layer deposition at low temperatures
作者
关键词
-
出版物
JOURNAL OF MATERIALS CHEMISTRY
Volume 21, Issue 41, Pages 16488
出版商
Royal Society of Chemistry (RSC)
发表日期
2011-09-16
DOI
10.1039/c1jm12245b

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