Non-aqueous sol–gel routes applied to atomic layer deposition of oxides

Title
Non-aqueous sol–gel routes applied to atomic layer deposition of oxides
Authors
Keywords
-
Journal
JOURNAL OF MATERIALS CHEMISTRY
Volume 19, Issue 4, Pages 454-462
Publisher
Royal Society of Chemistry (RSC)
Online
2008-09-29
DOI
10.1039/b806215c

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