Carboxylic Acids as Oxygen Sources for the Atomic Layer Deposition of High-κ Metal Oxides

Published 2008 View Full Article

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Title
Carboxylic Acids as Oxygen Sources for the Atomic Layer Deposition of High-κ Metal Oxides
Authors
Keywords
-
Journal
Journal of Physical Chemistry C
Volume 112, Issue 33, Pages 12754-12759
Publisher
American Chemical Society (ACS)
Online
2008-07-18
DOI
10.1021/jp8037363

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