Fabrication of Photonic Wire and Crystal Circuits in Silicon-on-Insulator Using 193-nm Optical Lithography

Published 2009 View Full Article

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Title
Fabrication of Photonic Wire and Crystal Circuits in Silicon-on-Insulator Using 193-nm Optical Lithography
Authors
Keywords
-
Journal
JOURNAL OF LIGHTWAVE TECHNOLOGY
Volume 27, Issue 18, Pages 4076-4083
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2009-08-24
DOI
10.1109/jlt.2009.2022282

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